Ultra Clean Processing of Silicon Surfaces VI is popular PDF and ePub book, written by Marc Heyns in 2003-05-02, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Ultra Clean Processing of Silicon Surfaces VI can be Read Online from any device for your convenience.
Ultra Clean Processing of Silicon Surfaces VI Book PDF Summary
The issues addressed by the Sixth International Symposium on the Ultra Clean Processing of Silicon Surfaces included all aspects of ultra-clean Si-technology, cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing. Volume is indexed by Thomson Reuters CPCI-S (WoS). This covered studies of Si-surface chemistry and topography and its relationship to device performance and process yield, cleaning in relationship to new gate stacks, cleaning at the interconnect level, resist stripping and polymer removal, cleaning and contamination control of various new materials, wafer backside cleaning and cleaning following Chemical-Mechanical-Polishing (CMP).
Detail Book of Ultra Clean Processing of Silicon Surfaces VI PDF
- Author : Marc Heyns
- Release : 02 May 2003
- Publisher : Trans Tech Publications Ltd
- ISBN : 9783035707205
- Genre : Technology & Engineering
- Total Page : 320 pages
- Language : English
- PDF File Size : 15,5 Mb
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