Ultra Clean Processing of Semiconductor Surfaces X is popular PDF and ePub book, written by Paul Mertens in 2012-04-12, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Ultra Clean Processing of Semiconductor Surfaces X can be Read Online from any device for your convenience.
Ultra Clean Processing of Semiconductor Surfaces X Book PDF Summary
The International Symposium on Ultra-Clean Processing of Semiconductor Surfaces (UCPSS) is a bi-annual conference which has been organized by IMEC since 1992. Volume is indexed by Thomson Reuters CPCI-S (WoS). The scope of the symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacture. At first, silicon was typically the main semiconductor of interest. As other semiconducting materials such as SiGe, SiC, Ge and III-V compounds came under consideration for future devices, the scope was broadened so as to include these materials. Parallelling the fast-moving CMOS industry, the photovoltaic industry has also recognized the need to make improvements in cleaning. Moreover, in order to promote these semiconductor cleaning activities in PV, it was decided to add a special session focused on this topic.
Detail Book of Ultra Clean Processing of Semiconductor Surfaces X PDF
- Author : Paul Mertens
- Release : 12 April 2012
- Publisher : Trans Tech Publications Ltd
- ISBN : 9783038137009
- Genre : Technology & Engineering
- Total Page : 356 pages
- Language : English
- PDF File Size : 7,6 Mb
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