Ultra Clean Processing of Semiconductor Surfaces XIII is popular PDF and ePub book, written by Paul W. Mertens in 2016-09-05, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Ultra Clean Processing of Semiconductor Surfaces XIII can be Read Online from any device for your convenience.
Ultra Clean Processing of Semiconductor Surfaces XIII Book PDF Summary
This volume contains the proceedings of 13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2016, Knokke, Belgium, September 12-14, 2016) (www.ucpss.org) and includes studies on cleaning such as particle removal using acoustic enhancement, removal of metallic contamination, pattern collapse of fine flexible and fragile features, wetting and drying issues, control and measuring of contamination . FEOL and BEOL topics cover: chemistry of semiconductor surfaces, cleaning related to new gate stacks, cleaning at the interconnect level, selective wet etching, resist strip and polymer removal, cleaning and contamination control for various new materials and cleaning after Chemical-Mechanical-Polishing (CMP).
Detail Book of Ultra Clean Processing of Semiconductor Surfaces XIII PDF
- Author : Paul W. Mertens
- Release : 05 September 2016
- Publisher : Trans Tech Publications Ltd
- ISBN : 9783035730845
- Genre : Technology & Engineering
- Total Page : 414 pages
- Language : English
- PDF File Size : 14,6 Mb
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