Rapid Thermal Processing is popular PDF and ePub book, written by Richard B. Fair in 2012-12-02, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Rapid Thermal Processing can be Read Online from any device for your convenience.
Rapid Thermal Processing Book PDF Summary
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Detail Book of Rapid Thermal Processing PDF
- Author : Richard B. Fair
- Release : 02 December 2012
- Publisher : Academic Press
- ISBN : 9780323139809
- Genre : Technology & Engineering
- Total Page : 441 pages
- Language : English
- PDF File Size : 18,5 Mb
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