Advances in Rapid Thermal and Integrated Processing is popular PDF and ePub book, written by F. Roozeboom in 2013-03-09, it is a fantastic choice for those who relish reading online the Science genre. Let's immerse ourselves in this engaging Science book by exploring the summary and details provided below. Remember, Advances in Rapid Thermal and Integrated Processing can be Read Online from any device for your convenience.
Advances in Rapid Thermal and Integrated Processing Book PDF Summary
Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Detail Book of Advances in Rapid Thermal and Integrated Processing PDF
- Author : F. Roozeboom
- Release : 09 March 2013
- Publisher : Springer Science & Business Media
- ISBN : 9789401587112
- Genre : Science
- Total Page : 568 pages
- Language : English
- PDF File Size : 13,7 Mb
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