Rapid Thermal Processing and beyond Applications in Semiconductor Processing is popular PDF and ePub book, written by Wielfried Lerch in 2008-03-24, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Rapid Thermal Processing and beyond Applications in Semiconductor Processing can be Read Online from any device for your convenience.
Rapid Thermal Processing and beyond Applications in Semiconductor Processing Book PDF Summary
Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.
Detail Book of Rapid Thermal Processing and beyond Applications in Semiconductor Processing PDF
- Author : Wielfried Lerch
- Release : 24 March 2008
- Publisher : Trans Tech Publications Ltd
- ISBN : 9783038131731
- Genre : Technology & Engineering
- Total Page : 448 pages
- Language : English
- PDF File Size : 17,7 Mb
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