Rapid Thermal Processing for Future Semiconductor Devices is popular PDF and ePub book, written by H. Fukuda in 2003-04-02, it is a fantastic choice for those who relish reading online the Science genre. Let's immerse ourselves in this engaging Science book by exploring the summary and details provided below. Remember, Rapid Thermal Processing for Future Semiconductor Devices can be Read Online from any device for your convenience.
Rapid Thermal Processing for Future Semiconductor Devices Book PDF Summary
This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
Detail Book of Rapid Thermal Processing for Future Semiconductor Devices PDF
- Author : H. Fukuda
- Release : 02 April 2003
- Publisher : Elsevier
- ISBN : 9780080540269
- Genre : Science
- Total Page : 161 pages
- Language : English
- PDF File Size : 16,6 Mb
If you're still pondering over how to secure a PDF or EPUB version of the book Rapid Thermal Processing for Future Semiconductor Devices by H. Fukuda, don't worry! All you have to do is click the 'Get Book' buttons below to kick off your Download or Read Online journey. Just a friendly reminder: we don't upload or host the files ourselves.