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Fundamental Aspects of Ultrathin Dielectrics on Si based Devices Book PDF Summary

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

Detail Book of Fundamental Aspects of Ultrathin Dielectrics on Si based Devices PDF

Fundamental Aspects of Ultrathin Dielectrics on Si based Devices
  • Author : Eric Garfunkel
  • Release : 06 December 2012
  • Publisher : Springer Science & Business Media
  • ISBN : 9789401150088
  • Genre : Technology & Engineering
  • Total Page : 503 pages
  • Language : English
  • PDF File Size : 13,5 Mb

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