The Physics and Chemistry of SiO2 and the Si SiO2 Interface 2 is popular PDF and ePub book, written by B.E. Deal in 2013-11-09, it is a fantastic choice for those who relish reading online the Science genre. Let's immerse ourselves in this engaging Science book by exploring the summary and details provided below. Remember, The Physics and Chemistry of SiO2 and the Si SiO2 Interface 2 can be Read Online from any device for your convenience.
The Physics and Chemistry of SiO2 and the Si SiO2 Interface 2 Book PDF Summary
The first international symposium on the subject "The Physics and Chemistry of Si02 and the Si-Si02 Interface," organized in association with the Electrochemical Society, Inc. , was held in Atlanta, Georgia on May 15- 20, 1988. This symposium contained sixty papers and was so successful that the sponsoring divisions decided to schedule it on a regular basis every four years. Thus, the second symposium on "The Physics and Chemistry of Si02 and the Si02 Interface was held May 18-21, 1992 in St. Louis, Missouri, again sponsored by the Electronics and Dielectrics Science and Technology Divisions of The Electrochemical Society. This volume contains manuscripts of most of the fifty nine papers presented at the 1992 symposium, and is divided into eight chapters - approximating the organization of the symposium. Each chapter is preceded with an introduction by the session organizers. It is appropriate to provide a general assessment of the current status and understanding of the physics and chemistry of Si02 and the Si02 interface before proceeding with a brief overview of the individual chapters. Semiconductor devices have continued to scale down in both horizontal and vertical dimensions. This has resulted in thinner gate and field oxides as well as much closer spacing of individual device features. As a result, surface condition, native oxide composition, and cleaning and impurity effects now provide a much more significant contribution to the properties of oxides and their interfaces.
Detail Book of The Physics and Chemistry of SiO2 and the Si SiO2 Interface 2 PDF
- Author : B.E. Deal
- Release : 09 November 2013
- Publisher : Springer Science & Business Media
- ISBN : 9781489915887
- Genre : Science
- Total Page : 505 pages
- Language : English
- PDF File Size : 12,5 Mb
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