Single Chamber Processing is popular PDF and ePub book, written by Y.I. Nissim in 1993-02-15, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Single Chamber Processing can be Read Online from any device for your convenience.
Single Chamber Processing Book PDF Summary
Single chamber processing has attracted the attention of a number of researchers as well as industries as an alternative processing "philosophy" to complement or even replace the stringent environment of micro- and optoelectronics device fabrication. Up till now single chamber processing has been an elusive manufacturing objective throughout the history of integrated circuit technology. With the emergence of integrated processing tools in recent years, significant segments for continuous fabrication processes have been successfully realised and their potential has already innovated the industry. The 14 papers in this volume cover topics such as: The background of this approach and up-dated status; Design and concepts of relevant cluster tools equipment; Specific process modules such as deposition chambers (CVD, RTCVD, UVCVD, ...) annealing or etching reactors; and Standardization efforts. The work will provide both a stimulus for future research in this field, as well as useful reference material on the new technology trends in microelectronic device manufacturing technology.
Detail Book of Single Chamber Processing PDF
- Author : Y.I. Nissim
- Release : 15 February 1993
- Publisher : Elsevier
- ISBN : 9780444596932
- Genre : Technology & Engineering
- Total Page : 173 pages
- Language : English
- PDF File Size : 9,5 Mb
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