Handbook of Silicon Based MEMS Materials and Technologies is popular PDF and ePub book, written by Markku Tilli in 2015-09-02, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Handbook of Silicon Based MEMS Materials and Technologies can be Read Online from any device for your convenience.
Handbook of Silicon Based MEMS Materials and Technologies Book PDF Summary
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory
Detail Book of Handbook of Silicon Based MEMS Materials and Technologies PDF
- Author : Markku Tilli
- Release : 02 September 2015
- Publisher : William Andrew
- ISBN : 9780323312233
- Genre : Technology & Engineering
- Total Page : 826 pages
- Language : English
- PDF File Size : 21,9 Mb
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