Handbook of Thin film Deposition Processes and Techniques is popular PDF and ePub book, written by Krishna Seshan in 2002, it is a fantastic choice for those who relish reading online the Chemical vapor deposition genre. Let's immerse ourselves in this engaging Chemical vapor deposition book by exploring the summary and details provided below. Remember, Handbook of Thin film Deposition Processes and Techniques can be Read Online from any device for your convenience.
Handbook of Thin film Deposition Processes and Techniques Book PDF Summary
The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Detail Book of Handbook of Thin film Deposition Processes and Techniques PDF
- Author : Krishna Seshan
- Release : 01 October 2024
- Publisher : Unknown
- ISBN : 6612253193
- Genre : Chemical vapor deposition
- Total Page : 629 pages
- Language : English
- PDF File Size : 12,6 Mb
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