Temperature Measurement during Millisecond Annealing is popular PDF and ePub book, written by Denise Reichel in 2016-01-07, it is a fantastic choice for those who relish reading online the Science genre. Let's immerse ourselves in this engaging Science book by exploring the summary and details provided below. Remember, Temperature Measurement during Millisecond Annealing can be Read Online from any device for your convenience.
Temperature Measurement during Millisecond Annealing Book PDF Summary
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Detail Book of Temperature Measurement during Millisecond Annealing PDF
- Author : Denise Reichel
- Release : 07 January 2016
- Publisher : Springer
- ISBN : 9783658113889
- Genre : Science
- Total Page : 128 pages
- Language : English
- PDF File Size : 19,7 Mb
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