Precision Nanometrology is popular PDF and ePub book, written by Wei Gao in 2010-06-14, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Precision Nanometrology can be Read Online from any device for your convenience.
Precision Nanometrology Book PDF Summary
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Detail Book of Precision Nanometrology PDF
- Author : Wei Gao
- Release : 14 June 2010
- Publisher : Springer Science & Business Media
- ISBN : 9781849962544
- Genre : Technology & Engineering
- Total Page : 358 pages
- Language : English
- PDF File Size : 18,6 Mb
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