Micro and Nano Fabrication is popular PDF and ePub book, written by Hans H. Gatzen in 2015-01-02, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Micro and Nano Fabrication can be Read Online from any device for your convenience.
Micro and Nano Fabrication Book PDF Summary
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Detail Book of Micro and Nano Fabrication PDF
- Author : Hans H. Gatzen
- Release : 02 January 2015
- Publisher : Springer
- ISBN : 9783662443958
- Genre : Technology & Engineering
- Total Page : 537 pages
- Language : English
- PDF File Size : 9,7 Mb
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