Electron Beam Lithography Process Optimization is popular PDF and ePub book, written by Rohan Handa in 2011-12, it is a fantastic choice for those who relish reading online the Architecture genre. Let's immerse ourselves in this engaging Architecture book by exploring the summary and details provided below. Remember, Electron Beam Lithography Process Optimization can be Read Online from any device for your convenience.
Electron Beam Lithography Process Optimization Book PDF Summary
Technical Report from the year 2011 in the subject Design (Industry, Graphics, Fashion), University of Southern California, language: English, abstract: Currently, nanowires have aroused intensive attention due to their interesting electric and optical properties as well as potentially wide application (For example, nanowires can be used as a promising structure for transistor channels). For compound semiconductor nanowires, Nanoscale Selective Area MOCVD (Metalorganic Chemical Vapor Deposition), or NS‐SAG, is a very attractive growth technique for the fabrication of sophisticated nanowire structure, because by using this technique, diameter and location of wires are controllable, with no incorporation of unwanted metals. It is achieved by deposition of a nano‐openingarray ‐patterned dielectric mask above the substrate. Since crystals cannot be formed on dielectric mask, nanowire growth only occurs at openings, with desired diameters and locations, as shown in Fig 1. Pattern of nano opening arrays is of vital importance since it governs the size, location and density of nanowires as wells as growth rate and behavior.
Detail Book of Electron Beam Lithography Process Optimization PDF
- Author : Rohan Handa
- Release : 01 December 2011
- Publisher : GRIN Verlag
- ISBN : 9783656083160
- Genre : Architecture
- Total Page : 37 pages
- Language : English
- PDF File Size : 12,7 Mb
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