Advanced MEMS NEMS Fabrication and Sensors is popular PDF and ePub book, written by Zhuoqing Yang in 2021-10-12, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Advanced MEMS NEMS Fabrication and Sensors can be Read Online from any device for your convenience.
Advanced MEMS NEMS Fabrication and Sensors Book PDF Summary
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Detail Book of Advanced MEMS NEMS Fabrication and Sensors PDF
- Author : Zhuoqing Yang
- Release : 12 October 2021
- Publisher : Springer Nature
- ISBN : 9783030797492
- Genre : Technology & Engineering
- Total Page : 312 pages
- Language : English
- PDF File Size : 16,6 Mb
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