The Physics of Microfabrication is popular PDF and ePub book, written by Ivor Brodie in 2013-11-11, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, The Physics of Microfabrication can be Read Online from any device for your convenience.
The Physics of Microfabrication Book PDF Summary
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Detail Book of The Physics of Microfabrication PDF
- Author : Ivor Brodie
- Release : 11 November 2013
- Publisher : Springer Science & Business Media
- ISBN : 9781489921604
- Genre : Technology & Engineering
- Total Page : 518 pages
- Language : English
- PDF File Size : 18,5 Mb
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