Science and Technology of Defects in Silicon is popular PDF and ePub book, written by C.A.J. Ammerlaan in 2014-01-01, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Science and Technology of Defects in Silicon can be Read Online from any device for your convenience.
Science and Technology of Defects in Silicon Book PDF Summary
This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities. In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.
Detail Book of Science and Technology of Defects in Silicon PDF
- Author : C.A.J. Ammerlaan
- Release : 01 January 2014
- Publisher : Elsevier
- ISBN : 9780080983646
- Genre : Technology & Engineering
- Total Page : 518 pages
- Language : English
- PDF File Size : 10,6 Mb
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