Run to Run Control in Semiconductor Manufacturing is popular PDF and ePub book, written by James Moyne in 2018-10-08, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Run to Run Control in Semiconductor Manufacturing can be Read Online from any device for your convenience.
Run to Run Control in Semiconductor Manufacturing Book PDF Summary
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Detail Book of Run to Run Control in Semiconductor Manufacturing PDF
- Author : James Moyne
- Release : 08 October 2018
- Publisher : CRC Press
- ISBN : 9781420040661
- Genre : Technology & Engineering
- Total Page : 368 pages
- Language : English
- PDF File Size : 21,5 Mb
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