Physical Design and Mask Synthesis for Directed Self Assembly Lithography is popular PDF and ePub book, written by Seongbo Shim in 2018-03-21, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Physical Design and Mask Synthesis for Directed Self Assembly Lithography can be Read Online from any device for your convenience.
Physical Design and Mask Synthesis for Directed Self Assembly Lithography Book PDF Summary
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Detail Book of Physical Design and Mask Synthesis for Directed Self Assembly Lithography PDF
- Author : Seongbo Shim
- Release : 21 March 2018
- Publisher : Springer
- ISBN : 9783319762944
- Genre : Technology & Engineering
- Total Page : 144 pages
- Language : English
- PDF File Size : 10,7 Mb
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