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Organometallic Vapor Phase Epitaxy Book PDF Summary

Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.

Detail Book of Organometallic Vapor Phase Epitaxy PDF

Organometallic Vapor Phase Epitaxy
  • Author : Gerald B. Stringfellow
  • Release : 02 December 2012
  • Publisher : Elsevier
  • ISBN : 9780323139175
  • Genre : Science
  • Total Page : 417 pages
  • Language : English
  • PDF File Size : 21,7 Mb

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Organometallic Vapor Phase Epitaxy

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