Micro Mechanical Systems is popular PDF and ePub book, written by T. Fukuda in 1998-07-24, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, Micro Mechanical Systems can be Read Online from any device for your convenience.
Micro Mechanical Systems Book PDF Summary
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Detail Book of Micro Mechanical Systems PDF
- Author : T. Fukuda
- Release : 24 July 1998
- Publisher : Elsevier
- ISBN : 9780080536545
- Genre : Technology & Engineering
- Total Page : 278 pages
- Language : English
- PDF File Size : 13,7 Mb
If you're still pondering over how to secure a PDF or EPUB version of the book Micro Mechanical Systems by T. Fukuda, don't worry! All you have to do is click the 'Get Book' buttons below to kick off your Download or Read Online journey. Just a friendly reminder: we don't upload or host the files ourselves.