Etching in Microsystem Technology is popular PDF and ePub book, written by Michael Köhler in 2008-07-11, it is a fantastic choice for those who relish reading online the Science genre. Let's immerse ourselves in this engaging Science book by exploring the summary and details provided below. Remember, Etching in Microsystem Technology can be Read Online from any device for your convenience.
Etching in Microsystem Technology Book PDF Summary
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.
Detail Book of Etching in Microsystem Technology PDF
- Author : Michael Köhler
- Release : 11 July 2008
- Publisher : John Wiley & Sons
- ISBN : 9783527613793
- Genre : Science
- Total Page : 384 pages
- Language : English
- PDF File Size : 16,8 Mb
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