Database Needs for Modeling and Simulation of Plasma Processing is popular PDF and ePub book, written by National Research Council in 1996-10-21, it is a fantastic choice for those who relish reading online the Science genre. Let's immerse ourselves in this engaging Science book by exploring the summary and details provided below. Remember, Database Needs for Modeling and Simulation of Plasma Processing can be Read Online from any device for your convenience.
Database Needs for Modeling and Simulation of Plasma Processing Book PDF Summary
In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.
Detail Book of Database Needs for Modeling and Simulation of Plasma Processing PDF
- Author : National Research Council
- Release : 21 October 1996
- Publisher : National Academies Press
- ISBN : 9780309175135
- Genre : Science
- Total Page : 74 pages
- Language : English
- PDF File Size : 9,7 Mb
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