High Sensitivity Moir 9 Interferometry with Phase Shifting at Nano Resolution is popular PDF and ePub book, written by Bicheng Chen in 2011, it is a fantastic choice for those who relish reading online the Uncategoriezed genre. Let's immerse ourselves in this engaging Uncategoriezed book by exploring the summary and details provided below. Remember, High Sensitivity Moir 9 Interferometry with Phase Shifting at Nano Resolution can be Read Online from any device for your convenience.
High Sensitivity Moir 9 Interferometry with Phase Shifting at Nano Resolution Book PDF Summary
Due to insatiate demand for miniaturization of electronics, there is a need for new techniques to measure full-field strain at micro-scale structures. In addition, Micro-Electronic-Mechanical-Systems (MEMS) require a high resolution and high sensitivity material property characterization technique. In this study, a theoretic model for a high sensitivity Moiré Interferometry (MI) for measuring nano-scale strain field has been developed. The study also includes the application of the proposed measurement technique for the study of reliability of next generation nano-electronics/power electronics. The study includes both theoretical and experimental work. In the theoretical part, a far field modeling of a Moiré Interferometer (MI) using the mode decomposition method is proposed according to the analytical formulation from the scalar diffraction theory.^The wave propagation within the defined MI far field domain is solved analytically for a single frequency surface relieved grating structure following the Rayleigh-Sommerfeld formulation under the paraxial approximation. It is shown that the far-field electrical field and the intensity interferogram can be calculated using the mode decomposition method. Furthermore, the near-field (propagation distance
Detail Book of High Sensitivity Moir 9 Interferometry with Phase Shifting at Nano Resolution PDF
- Author : Bicheng Chen
- Release : 20 September 2024
- Publisher : Unknown
- ISBN : OCLC:769459439
- Genre : Uncategoriezed
- Total Page : 282 pages
- Language : English
- PDF File Size : 17,5 Mb
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