CCD Image Sensors in Deep Ultraviolet is popular PDF and ePub book, written by Flora Li in 2006-01-05, it is a fantastic choice for those who relish reading online the Technology & Engineering genre. Let's immerse ourselves in this engaging Technology & Engineering book by exploring the summary and details provided below. Remember, CCD Image Sensors in Deep Ultraviolet can be Read Online from any device for your convenience.
CCD Image Sensors in Deep Ultraviolet Book PDF Summary
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
Detail Book of CCD Image Sensors in Deep Ultraviolet PDF
- Author : Flora Li
- Release : 05 January 2006
- Publisher : Springer Science & Business Media
- ISBN : 9783540274124
- Genre : Technology & Engineering
- Total Page : 231 pages
- Language : English
- PDF File Size : 11,7 Mb
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